Semiconductor Manufacturing Technology

Quirk, Michael Serda, Julian

Ouvrage indisponible

Éditeur
Pearson Education (US)
Pages
666
Parution
novembre 2000
Format
Cartonné
Langue
Anglais
Dimensions
300 × 217 × 31 cm
EAN
9780130815200
  • Résumé

An introduction to the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra-large-scale integrated semiconductors. The book provides technical information and strikes a balance between the process and equipment technology found in wafer fabrications.
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