Interlayer Dielectrics for Semiconductor Technologies

Collectif

Ouvrage indisponible

Éditeur
Academic Press Inc
Pages
464
Parution
octobre 2003
Format
Cartonné
Langue
Anglais
Dimensions
240 × 165 × 25 cm
EAN
9780125112215
  • Résumé

Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. This work covers the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation. It brings together the science and technology of interlayer dielectrics materials.
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