EUV Lithography

Bakshi, Vivek

Ouvrage indisponible

Éditeur
Wiley-Blackwell
Pages
700
Parution
janvier 2009
Format
Cartonné
Langue
Anglais
Dimensions
262 × 178 × 43 cm
EAN
9780470471555
  • Résumé

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
Bio de l'auteur
Sommaire / contenu
Retour en haut de page