Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications

Attwood, David

Ouvrage indisponible

Éditeur
Cambridge University Press
Pages
504
Parution
février 2007
Format
Livre broché
Langue
Anglais
Dimensions
253 × 177 × 26 cm
EAN
9780521029971
  • Résumé

This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.
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