Materials Science in Microelectronics: v. I: Relationships Between Thin Film Processing and Structure

Machlin, Eugene

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Éditeur
Elsevier Science Ltd
Pages
270
Parution
septembre 2005
Format
Cartonné
Langue
Anglais
Dimensions
240 × 165 × 17 cm
EAN
9780080446400
  • Résumé

Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing/structure relationship, and structure/properties relationship. This volume focuses on the first relationship - that between processing and the structure of the thin-film.
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