Fundamental Principles of Optical Lithography: The Science of Microfabrication

Mack, Chris A.

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Éditeur
Wiley-Blackwell (an imprint of John Wiley & Sons Ltd)
Pages
534
Parution
novembre 2007
Format
Cartonné
Langue
Anglais
Dimensions
249 × 171 × 36 cm
EAN
9780470018934
  • Résumé

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
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